Oxygen deficiency and vacancy formation in LSCO/PLZT/LSCO capacitors
Friessnegg, T., B. Nielsen, V.J. Ghosh, S. Aggarwal, D.J. Keeble, E.H. Poindexter, Ramamoorthy Ramesh
Vacancy type defects in La0.5Sr0.5CoO3/Pb0.9La0.1Zr0.2 Ti0.8/La0.5Sr0.5CoO3 capacitors were investigated by positron depth profiling. Post-growth annealing of the capacitor structure in oxygen deficient atmosphere exhibits the formation of vacancy type defects in all layers. A significant increase in open volume defects was found in the top and bottom electrode. The changes in the bottom electrode were studied more closely by etching off the top layer.
Materials Research Society Symposium - Proceedings
Year of Publication
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