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Energy Technologies Area (ETA) researchers are continually building on the strong scientific foundation we have developed over the past 50 years. We address the world’s most pressing climate challenges by bringing to market energy-efficient innovations across the buildings, transportation, and industrial sectors. ETA is at the forefront of developing better batteries for electric vehicles; improving the country's aging electrical grid and innovating distributed energy and storage solutions; developing grid-interactive, efficient buildings; and providing the most comprehensive market and data analysis worldwide for renewable technologies like wind and solar.
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The Energy Technologies Area (ETA) is unique in translating fundamental scientific discoveries into scalable technology adoption. Our approach combines an understanding of the marketplace and the role of state and federal regulation and policies. ETA's research drives real-world, practical results that affect and improve the everyday lives of Americans and those across the globe. Saving energy and battling the Climate Crisis are key to the foundation of our research, which is driven by technoeconomic analysis and in-lab experimentation and discovery.

Energy Performance of Cleanroom Environmental Systems

Publication Type

Conference Paper

Date Published

05/2002

Authors

Xu, Tengfang T., William F. Tschudi

Abstract

By developing metrics for evaluating cleanroom air system performance and overall load intensity, this paper provides energy benchmarking results for thirteen cleanroom environmental system performance, and identifies opportunities for improving cleanroom energy efficiency while maintaining or improving cleanroom contamination control. Comparisons with IEST Recommended Practice are made to examine the performance of cleanroom air systems. These results can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance. Results from this study confirm that there are opportunities in improving energy efficiency of cleanroom environmental systems while maintaining effective contamination control.

Journal

Institute of Environmental Science and Technology (IEST) 48th Annual Technical Meeting

Year of Publication

2001