Depth profile study of ferroelectric PbZr0.2Ti0.8O3 films
Publication Type
Journal Article
Authors
DOI
Abstract
Depth profile study of ferroelectric PbZr0.2Ti0.8O3 films was carried out using grazing incident x-ray scattering (GIXS) method. GIXS measurements show the evolution of in-plane compression of the lattice parameter as a function of depth within the films. The results indicate that measured in-plane lattice parameters are asymmetric, which suggest an orthorhombic distortion of the lattice in the plane of the films.
Journal
Journal of Applied Physics
Volume
92
Year of Publication
2002
ISSN
00218979
Notes
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