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Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers

Publication Type

Journal Article

Authors

Wang, Y., C. Ganpule, B.T. Liu, H. Li, K. Mori, B. Hill, M. Wuttig, Ramamoorthy Ramesh, J. Finder, Z. Yu, R. Droopad, K. Eisenbeiser

DOI

10.1063/1.1428413

Abstract

In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.

Journal

Applied Physics Letters

Volume

Year of Publication

2002

ISSN

00036951

Notes

cited By 126

Research Areas

Ramesh Lab