Direct hysteresis measurements of single nanosized ferroelectric capacitors contacted with an atomic force microscope

Publication Type

Journal Article

Authors

DOI

Abstract

Direct hysteresis measurements on single submicron structure sizes were performed on epitaxial ferroelectric Pb(Zr,Ti)O3 thin films grown on SrTiO3 with La0.5Sr0.5CoO3 (LSCO) electrodes. The samples were fabricated by focused-ion-beam milling resulting in pad sizes down to 200 nmX200 nm. The influence of parasitic capacitance of the measurement setup was eliminated by applying an enhanced compensation procedure. No size effects were observed in capacitors milled down to 400 nmX400 nm. Thus, a published increase of P1max for decreasing pad size can be explained by the parasitic influence of the setup. Finally, the inaccuracy of increasing coercive voltage due to the coating of the cantilever of the atomic force microscope is discussed. © 2001 American Institute of Physics.

Journal

Applied Physics Letters

Volume

79

Year of Publication

2001

ISSN

00036951

Notes

cited By 62

Research Areas