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Analysis of thin PZT films as a function of depth and thickness by GIXS

Publication Type

Journal Article

Authors

Petit, M., V. Nagarajan, S. Aggarwal, Ramamoorthy Ramesh, L.J. Martínez-Miranda

DOI

10.1080/10584580008216680

Abstract

We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint.

Journal

Integrated Ferroelectrics

Volume

Year of Publication

2000

ISSN

10584587

Notes

cited By 2

Research Areas

Ramesh Lab